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Influence of Phase Transformation on Stress Evolution during Growth of Metal Thin Films on Silicon

โœ Scribed by Fillon, A.; Abadias, G.; Michel, A.; Jaouen, C.; Villechaise, P.


Book ID
120195852
Publisher
The American Physical Society
Year
2010
Tongue
English
Weight
974 KB
Volume
104
Category
Article
ISSN
0031-9007

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