Influence of irradiation with swift heavy ions on multilayer Si/SiO2heterostructures

✍ Scribed by Kachurin, G. A.; Cherkova, S. G.; Marin, D. V.; Volodin, V. A.; Cherkov, A. G.; Antonenko, A. Kh.; Kamaev, G. N.; Skuratov, V. A.

• Book ID: 120198707
• Publisher: Springer
• Year: 2013
• Tongue: English
• Weight: 373 KB
• Volume: 47
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/S1063782613030111