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Influence of gas atmosphere during growth interruption in the deposition of ZnO films by magnetron sputtering

โœ Scribed by T.E. Park; B.H. Kong; H.K. Cho; D.J. Park; J.Y. Lee


Book ID
108239070
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
539 KB
Volume
376-377
Category
Article
ISSN
0921-4526

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