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Deposition of ZnO thin film on polytetrafluoroethylene substrate by the magnetron sputtering method

โœ Scribed by Yun-yan Liu; Yu-zhen Yuan; Xu-tuan Gao; Shi-shen Yan; Xin-zhong Cao; Gong-xiang Wei

Book ID
113790951
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
271 KB
Volume
61
Category
Article
ISSN
0167-577X

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Epitaxial growth of ZnO thin films on Al
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โœ Rahmane, S. ;Abdallah, B. ;Soussou, A. ;Gautron, E. ;Jouan, P.-Y. ;Le Brizoual, ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 465 KB

## Abstract Hexagonal aluminium nitride (AlN) and zinc oxide (ZnO) thin films have been deposited by DC and RF reactive magnetron sputtering at room temperature. For a first set of samples, sputtered AlN films were deposited on silicon ZnO substrate. For a second set, ZnO films were deposited on Al