✦ LIBER ✦

Influence of ejection angle on residual stress and optical properties of sputtering Ta2O5 thin films

✍ Scribed by Chuen-Lin Tien

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of sputtering anisotropic ejectio

✍ Chuen-Lin Tien 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 670 KB

Comparision of residual stress and optic

✍ S.G. Yoon; Y.T. Kim; H.K. Kim; M.J. Kim; H.M. Lee; D.H. Yoon 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 196 KB

Optical Properties of Crystalline Ta2O5

✍ Darmasetiawan, H. ;Irzaman, ;Nur Indro, M. ;Sukaryo, S.G. ;Hikam, M. ;Peng Bo, 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 159 KB 👁 2 views

Electrical properties of thin RF sputter

✍ M. Pecovska-Gjorgjevich; N. Novkovski; E. Atanassova 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 290 KB

Effect of sputtering pressure and rapid

✍ Ji-cheng ZHOU; Di-tian LUO; You-zhen LI; Zheng LIU 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 471 KB

Optical properties and microstructure of

✍ Xiudi Xiao, 肖秀娣; Guoping Dong, 董国平; Hongbo He, 贺洪波; Hongji Qi, 齐红基; Zhengxiu Fan 📂 Article 📅 2009 🏛 Optics InfoBase 🌐 English ⚖ 723 KB