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Effect of sputtering pressure and rapid thermal annealing on optical properties of Ta2O5 thin films

โœ Scribed by Ji-cheng ZHOU; Di-tian LUO; You-zhen LI; Zheng LIU


Book ID
117693693
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
471 KB
Volume
19
Category
Article
ISSN
1003-6326

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