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Rapid thermal processed thin films of reactively sputtered Ta2O5

✍ Scribed by A. Pignolet; G.Mohan Rao; S.B. Krupanidhi

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Dielectric constants of Ta2O5 thin films

✍ Susumu Shibata 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 592 KB

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Structures and properties of a Ta2O5 thi

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Optical Properties of Crystalline Ta2O5

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Nitridation of TiSi2 thin films by rapid

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