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Optical properties and microstructure of Ta2O5 thin films prepared by oblique angle deposition

✍ Scribed by Xiudi Xiao, 肖秀娣; Guoping Dong, 董国平; Hongbo He, 贺洪波; Hongji Qi, 齐红基; Zhengxiu Fan, 范正修; Jianda Shao, 邵建达

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