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Optical properties and microstructure of Ta2O5thin films prepared by ion assisted electron beam evaporation

✍ Scribed by Guangyong Zhang; Yiyu Xue; Peitao Guo; Hanhua Wang; Zhongjie Ma


Publisher
Wuhan University of Technology
Year
2008
Tongue
English
Weight
601 KB
Volume
23
Category
Article
ISSN
1000-2413

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Y 2 O 3 thin films were deposited by ion beam assisted deposition (IBAD) and the effects of fabrication parameters such as substrate temperature and ion energy on the structure, optical and electrical properties of the films were investigated. The results show that the deposited Y 2 O 3 films had le