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Influence of background pressure on the microstructure and optical properties of Mo/Si multilayers fabricated by magnetron sputtering

✍ Scribed by Peng Lv, ZaiQiang Zhang, JinTong Guan…

Book ID: 120816782
Publisher: Science in China Press (SCP)
Year: 2013
Tongue: English
Weight: 811 KB
Volume: 56
Category: Article
ISSN: 1672-1799
DOI: 10.1007/s11433-013-5240-0

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