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Influence of Al atoms on sputtering of Mo, W and Cu by Xe ions

✍ Scribed by BM Kalmykov; SYu Mikheev; OB Solov'ev; II Skarban


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
127 KB
Volume
44
Category
Article
ISSN
0042-207X

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