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Induced tantalum silicide formation by Ar+ ion implantation

✍ Scribed by Cebulla, H. ;Ekben, E. ;Gessner, T. ;Vetter, E.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Refractory metal silicide formation by i

✍ K.L. Wang; S.W. Chiang; F. Bacon; R.F. Reihl 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 315 KB

Silicide formation by Ar+ion bombardment

✍ R. Y. Lee; C. N. Whang; H. K. Kim; R. J. Smith 📂 Article 📅 1988 🏛 Springer 🌐 English ⚖ 462 KB

Formation of vanadium silicide by high d

✍ V.P. Salvi; A.M. Narsale; S.V. Vidwans; A.A. Rangwala; L. Guzman; M. Dapor; G. G 📂 Article 📅 1987 🏛 Elsevier Science ⚖ 74 KB

Silicide Formation at HfO2/Si and ZrO2/S

✍ Lebedinskii, Yu.; Zenkevich, A.; Filatov, D.; Antonov, D.; Gushina, J.; Maximov, 📂 Article 📅 2003 🏛 Cambridge University Press ⚖ 282 KB

Ar+ion beam induced silicide formation m

✍ C. N. Whang; H. K. Kim; R. Y. Lee; R. J. Smith 📂 Article 📅 1989 🏛 Springer 🌐 English ⚖ 577 KB

Formation of buried epitaxial Co silicid

✍ K. Kohlhof; S. Mantl; B. Stritzker; W. Jäger 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 598 KB