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Indirect laser etching of fused silica: Towards high etching rate processing

✍ Scribed by R. Böhme; K. Zimmer

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 905 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2007.02.109

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