Microstructuring of fused silica by lase
Microstructuring of fused silica by laser-induced backside wet etching using picosecond laser pulses
✍
M. Ehrhardt; G. Raciukaitis; P. Gecys; K. Zimmer
📂
Article
📅
2010
🏛
Elsevier Science
🌐
English
⚖ 447 KB