Increase of the deposition rate in reactive sputtering of metal oxides using a ceramic nitride target

✍ Scribed by Severin, D.; Kappertz, O.; Nyberg, T.; Berg, S.; Pflug, A.; Wuttig, M.

• Book ID: 121513620
• Publisher: American Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 489 KB
• Volume: 105
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.3124380