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Incorporation of nitrogen into carbon films produced by PECVD under bias voltage

✍ Scribed by Hartmann, J.; Schreck, M.; Baur, T.; Huber, H.; Assmann, W.; Schuler, H.; Stritzker, B.; Rauschenbach, B.

Book ID: 122944428
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 491 KB
Volume: 7
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(97)00328-2

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