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In-situ X-ray Photoemission Spectroscopy Study of Atomic Layer Deposition of TiO$_{2}$ on Silicon Substrate

✍ Scribed by Lee, Seung Youb; Jeon, Cheolho; Kim, Seok Hwan; Kim, Yooseok; Jung, Woosung; An, Ki-Seok; Park, Chong-Yun

Book ID
120195978
Publisher
Institute of Pure and Applied Physics
Year
2012
Tongue
English
Weight
406 KB
Volume
51
Category
Article
ISSN
0021-4922

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