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In situ X-ray photoelectron spectroscopy characterization of Al2O3/InSb interface evolution from atomic layer deposition

✍ Scribed by D.M. Zhernokletov; H. Dong; B. Brennan; J. Kim; R.M. Wallace

Book ID: 116245065
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 693 KB
Volume: 258
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2012.01.132

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