✦ LIBER ✦

In situ study of atomic layer epitaxy growth of tantalum oxide thin films from Ta(OC2H5)5 and H2O

✍ Scribed by Kaupo Kukli; Jaan Aarik; Aleks Aidla; Hele Siimon; Mikko Ritala; Markku Leskelä

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Properties of amorphous and crystalline

✍ Chaneliere, C.; Four, S.; Autran, J. L.; Devine, R. A. B.; Sandler, N. P. 📂 Article 📅 1998 🏛 American Institute of Physics 🌐 English ⚖ 440 KB

Structural and electrical properties of

✍ Florence Jolly; Maurizio Passacantando; Vicenzo Salerni; Luca Lozzi; Pietro Pico 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 159 KB

Atomic layer epitaxy growth of aluminum

✍ Kukli, Kaupo 📂 Article 📅 1997 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 393 KB

Atomic Layer Epitaxy Growth of BaS and B

✍ Ville Saanila; Jarkko Ihanus; Mikko Ritala; Markku Leskelä 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 365 KB 👁 2 views

ChemInform Abstract: Atomic Layer Epitax

✍ Ville Saanila; Jarkko Ihanus; Mikko Ritala; Markku Leskelae 📂 Article 📅 2010 🏛 John Wiley and Sons ⚖ 31 KB 👁 2 views

Initial Reactions in Chemical Vapor Depo

✍ Siodmiak, Magdalena; Frenking, Gernot; Korkin, Anatoli 📂 Article 📅 2000 🏛 American Chemical Society 🌐 English ⚖ 175 KB