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In-situ spectroscopic ellipsometry investigation and control of GaN growth mode in metal-organic vapor phase epitaxy at low pressures of 20 Torr

✍ Scribed by B. Cao; K. Xu; Y. Ishitani; A. Yoshikawa


Book ID
113936780
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
564 KB
Volume
455-456
Category
Article
ISSN
0040-6090

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