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In-situ As-P exchange monitoring in metal-organic vapor phase epitaxy of InGaAs/InP heterostructure by spectroscopic and kinetic ellipsometry

✍ Scribed by Shinya Sudo; Yoshiaki Nakano; Masakazu Sugiyama; Yukihiro Shimogaki; Hiroshi Komiyama; Kunio Tada

Book ID: 114086384
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 786 KB
Volume: 313-314
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00894-8

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