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In situ plasma diagnostics for chemical vapor deposition of nano-carbon thin film materials

✍ Scribed by A.N. Obraztsov; A.A. Zolotukhin; A.O. Ustinov; A.P. Volkov; Yu. Svirko; K. Jefimovs

Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 590 KB
Volume: 69
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(03)00333-2

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