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In situ observations of the real-time stress-evolution and delamination of thin Ta films on Si(100)

✍ Scribed by B.L French; J.C Bilello

Book ID: 118549988
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 701 KB
Volume: 446
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(03)01321-x

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