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In situ investigation of amorphous silicon-silicon dioxide interfaces by infrared ellipsometry

✍ Scribed by R. Ossikovski; H. Shirai; B. Drévillon


Book ID
115989256
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
269 KB
Volume
164-166
Category
Article
ISSN
0022-3093

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