In situ investigation of amorphous silicon/silicon nitride interfaces combining UV-visible and infrared ellipsometry

✍ Scribed by B. Drevillon

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 405 KB
• Volume: 24
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/0026-2692(93)90037-f