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In-situ doping of silicon using the gas immersion laser doping (GILD) process

✍ Scribed by P.G. Carey; T.W. Sigmon

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 587 KB
Volume: 43
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90234-1

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