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Fabrication and characterization of selectively grown Si1-xGex/Si p+/n heterojunctions using pulsed laser induced epitaxy and gas immersion laser doping
✍ Scribed by K.-J. Kramer; S. Talwar; E. Ishida; K.H. Weiner; T.W. Sigmon
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 532 KB
- Volume
- 69
- Category
- Article
- ISSN
- 0169-4332
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