✦ LIBER ✦
In-situ doping of and trench-refill with LPCVD-poly-silicon (I). (PH3/SiH4) ratio as a process-controlling parameter
✍ Scribed by Dr. H. Kühne; H. Harnisch; I. Flohr; Prof. Dr. W. Bertoldi
- Publisher
- John Wiley and Sons
- Year
- 1989
- Tongue
- English
- Weight
- 509 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0232-1300
No coin nor oath required. For personal study only.