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Laser doping of silicon role of the surface status in the incorporation mechanism

✍ Scribed by G.G. Bentini; M. Bianconi; L. Correra; R. Nipoti; D.A. Patti; A. Gasparotto

Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
326 KB
Volume
36
Category
Article
ISSN
0169-4332

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