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Impurity redistribution during sublimation in UHV

✍ Scribed by R. Oven; D.G. Ashworth; S. Al-Rawi

Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
220 KB
Volume
31
Category
Article
ISSN
0038-1101

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Redistribution of Heavy Metal Impurities
Redistribution of Heavy Metal Impurities in Silicon by Phosphorus Diffusion
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## Abstract Based on a model for redistributing heavy metals in two‐phase‐silicon an expression is obtained, describing the intensity of redistribution, being determined by the segregation coefficient between intrinsic and phosphorus‐doped silicon and the spatial extension of the phosphorus phase.