Control of impurity density in homoepitaxial semiconductor layers grown by sublimation at UHV : R. J. Bennett and C. Parish. Solid St. Electron.16 (1973), p. 497

• Publisher: Elsevier Science
• Year: 1973
• Tongue: English
• Weight: 104 KB
• Volume: 12
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(73)90304-1