Control of impurity density in homoepitaxial semiconductor layers grown by sublimation at UHV

✍ Scribed by R.J. Bennett; C. Parish

• Publisher: Elsevier Science
• Year: 1973
• Tongue: English
• Weight: 360 KB
• Volume: 16
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(73)90188-3