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Impurity Profiles at Multi-Pulse Electron-Beam Annealing of Ion-Implanted Silicon

✍ Scribed by Dvurechenskii, A. V. ;Grötzschel, R. ;Igonina, N. M. ;Kashnikov, B. P. ;Komolova, N. I.

Publisher
John Wiley and Sons
Year
1982
Tongue
English
Weight
318 KB
Volume
72
Category
Article
ISSN
0031-8965

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