✦ LIBER ✦

Improvement of the SiO2 deposition by 185 nm photolysis of N2O and SiH4 by addition of neopentane

✍ Scribed by Mathieu Petitjean; Nicole Proust; Jean-François Chapeaublanc; Jérôme Perrin

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SiO2 deposition by direct photolysis at

✍ Mathieu Petitjean; Nicole Proust; Jean-François Chapeaublanc; Jérôme Perrin 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 402 KB

SiO2 film growth by ArF laser photolysis

✍ Masaharu Tsuji; Minoru Sakumoto; Naoki Itoh; Hiroshi Obase; Yukio Nishimura 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 420 KB

Silicon oxide deposited by direct photol

✍ N Proust; M Petitjean; C Arnodo; M Beguet; J.F Chapeaublanc; J Perrin 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 314 KB

Modelling of silicon nitride deposition

✍ Bruno Allain; Jérôme Perrin; Jean Luc Guizot 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 369 KB

A comparison of SiO2 thin-film UVCVD rat

✍ C. Debauche; C. Licoppe; J. Flicstein 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 568 KB

Formation of electronically excited C2O

✍ W. Bauer; R. Meuser; K.H. Becker 📂 Article 📅 1984 🏛 Elsevier Science ⚖ 325 KB