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Improvement of quality and strain relaxation of GaN epilayer grown on SiC substrate by in situ SiNxinterlayer

✍ Scribed by Shiwei Song, Yang Liu, Hongwei Liang…

Book ID: 120681560
Publisher: Springer US
Year: 2013
Tongue: English
Weight: 337 KB
Volume: 24
Category: Article
ISSN: 0957-4522
DOI: 10.1007/s10854-013-1192-4

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