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Improved Pattern Transfer in Soft Lithography Using Composite Stamps

โœ Scribed by Odom, Teri W.; Love, J. Christopher; Wolfe, Daniel B.; Paul, Kateri E.; Whitesides, George M.


Book ID
121078260
Publisher
American Chemical Society
Year
2002
Tongue
English
Weight
587 KB
Volume
18
Category
Article
ISSN
0743-7463

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## Abstract Using highโ€aspectโ€ratio nanostructures fabricated via twoโ€photon laserโ€scanning lithography, we examine the deformation of elastomeric stamps used in soft nanolithography and the fidelity of patterns and replicas made using these stamps. Twoโ€photon laserโ€scanning lithography enables us