✦ LIBER ✦
Improved Pattern Transfer in Nanoimprint Lithography at 30 nm Half-Pitch by Substrate−Surface Functionalization
✍ Scribed by Jung, Gun-Young; Li, Zhiyong; Wu, Wei; Ganapathiappan, S.; Li, Xuema; Olynick, Deirdre L.; Wang, S. Y.; Tong, William M.; Williams, R. Stanley
- Book ID
- 126821790
- Publisher
- American Chemical Society
- Year
- 2005
- Tongue
- English
- Weight
- 312 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0743-7463
No coin nor oath required. For personal study only.