✦ LIBER ✦

Improved dose uniformity by utilizing the beam profile in the ion implantation process

✍ Scribed by R. Guenzel

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

On-line measurement of the spatial dose

✍ Thomas Stiehler 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 539 KB

Improvement of the dose uniformity in pl

✍ E. Stamate; N. Holtzer; H. Sugai 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 298 KB

Beam scanning system for the uniformity

✍ P. Desgardin; E. Ntsoenzok; J.F. Barbot; J. Briaud; J. Vernois; D.B. Isabelle 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 294 KB

The effect of dose rate on ion implanted

✍ S. Tian; S.-H. Yang; S. Morris; K. Parab; A.F. Tasch; D. Kamenitsa; R. Reece; B. 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 444 KB

Influence of sample placement on the dos

✍ Zhaoming Zeng; Xiubo Tian; Dixon Tat-Kun Kwok; Baoyin Tang; Chu, P.K. 📂 Article 📅 1999 🏛 IEEE 🌐 English ⚖ 176 KB

Dose-effect of the tyrosine sample impla

✍ Yu Zengliang; Shao Chunlin 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 270 KB