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Improved barrier properties of ultrathin Ru film with TaN interlayer for copper metallization

✍ Scribed by Qu, Xin-Ping; Tan, Jing-Jing; Zhou, Mi; Chen, Tao; Xie, Qi; Ru, Guo-Ping; Li, Bing-Zong

Book ID: 121284188
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 403 KB
Volume: 88
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2195112

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