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Implementation of an indium-tin-oxide (ITO) direct-Ohmic contact structure on a GaN-based light emitting diode

✍ Scribed by Liu, Yi-Jung; Huang, Chien-Chang; Chen, Tai-You; Hsu, Chi-Shiang; Liou, Jian-Kai; Tsai, Tsung-Yuan; Liu, Wen-Chau


Book ID
115414268
Publisher
Optical Society of America
Year
2011
Tongue
English
Weight
907 KB
Volume
19
Category
Article
ISSN
1094-4087

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## Abstract Wafer‐scale UV nanoimprint and dry etching processes were used to fabricate photonic crystal patterns on an indium tin oxide (ITO) top electrode of GaN‐based green light‐emitting diodes (LEDs). Photonic crystal patterns with pitches ranging from 600 to 900 nm were transferred to the ent