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Impact of an indium oxide/indium-tin oxide mixed structure for GaN-based light-emitting diodes

โœ Scribed by Yi-Jung Liu; Chih-Hung Yen; Chia-Hao Hsu; Kuo-Hui Yu; Li-Yang Chen; Tsung-Han Tsai; Wen-Chau Liu

Publisher
Optical Society of Japan
Year
2009
Tongue
English
Weight
156 KB
Volume
16
Category
Article
ISSN
1340-6000

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## Abstract Waferโ€scale UV nanoimprint and dry etching processes were used to fabricate photonic crystal patterns on an indium tin oxide (ITO) top electrode of GaNโ€based green lightโ€emitting diodes (LEDs). Photonic crystal patterns with pitches ranging from 600 to 900โ€‰nm were transferred to the ent