✦ LIBER ✦

Impact of low-temperature transient-enhanced diffusion of dopants in silicon

✍ Scribed by Bruno Baccus

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Impact of low-temperature transient-enha

📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 115 KB

Suppression of boron transient enhanced

✍ H.A.W. El Mubarek; Y. Wang; R. Price; J.M. Bonar; J. Zhang; P.L.F. Hemment; P. A 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 474 KB

Enhanced nitridation of silicon at low t

✍ Yutaka Ishikawa; Tomohisa Tamagawa 📂 Article 📅 1996 🏛 John Wiley and Sons 🌐 English ⚖ 540 KB

Low temperature VUV enhanced growth of t

✍ Parthiv Patel; Ian W. Boyd 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 340 KB

Impact of dopant profiles on the end of

✍ R.A. Camillo-Castillo; M.E. Law; K.S. Jones 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 251 KB

Ionization transients of shallow levels

✍ E. Rosencher; V. Mosser; G. Vincent 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 278 KB