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Enhanced nitridation of silicon at low temperature by ultraviolet irradiation

✍ Scribed by Yutaka Ishikawa; Tomohisa Tamagawa

Publisher: John Wiley and Sons
Year: 1996
Tongue: English
Weight: 540 KB
Volume: 79
Category: Article
ISSN: 8756-663X
DOI: 10.1002/ecjb.4420790208

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