Impact of low-temperature transient-enhanced diffusion of dopants in silicon : Bruno Baccus. Solid-State Electronics35(8), 1045 (1992)

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 115 KB
• Volume: 33
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(93)90224-m