✦ LIBER ✦
Impact of dopant profiles on the end of range defects for low energy germanium preamorphized silicon
✍ Scribed by R.A. Camillo-Castillo; M.E. Law; K.S. Jones
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 251 KB
- Volume
- 114-115
- Category
- Article
- ISSN
- 0921-5107
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