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Impact of Light-Element Impurities on Crystalline Defect Generation in Silicon Wafer

✍ Scribed by Tachibana, Tomihisa; Sameshima, Takashi; Kojima, Takuto; Arafune, Koji; Kakimoto, Koichi; Miyamura, Yoshiji; Harada, Hirofumi; Sekiguchi, Takashi; Ohshita, Yoshio; Ogura, Atsushi

Book ID
124049903
Publisher
Institute of Pure and Applied Physics
Year
2012
Tongue
English
Weight
420 KB
Volume
51
Category
Article
ISSN
0021-4922

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