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Imaging elastic property of surfaces at nanoscale using atomic force microscope

✍ Scribed by S. Banerjee; N. Gayathri; S. Dash; A.K. Tyagi; Baldev Raj

Book ID
108064102
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
354 KB
Volume
256
Category
Article
ISSN
0169-4332

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## Abstract We are developing metrology for rapid, quantitative assessment of elastic properties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable measurements of modulus at either a single point or as a map of local property variations. The information obtai