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Spatially resolved force spectroscopy of biological surfaces using the atomic force microscope

✍ Scribed by William F Heinz; Jan H Hoh


Book ID
114153146
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
813 KB
Volume
17
Category
Article
ISSN
0167-7799

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Sub-100 nm V-grooves in GaAs(001) surfaces have been fabricated by patterning a thin photoresist layer with an atomic force microscope (AFM) and subsequent wet-chemical etching. The nanolithography is based on the dynamic ploughing technique. Anisotropic etchants under investigation are bromine-meth