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[IEEE Twenty Seventh Annual IEEE/CPMT/SEMI International Electronics Manufacturing Technology Symposium - San Jose, CA, USA (17-18 July 2002)] 27th Annual IEEE/SEMI International Electronics Manufacturing Technology Symposium - Applications of intelligent control in improving dynamics of precision motion systems used in microelectronics manufacturing

✍ Scribed by Tian He,

Book ID: 126718581
Publisher: IEEE
Year: 2002
Weight: 385 KB
Category: Article
ISBN-13: 9780780373013
DOI: 10.1109/IEMT.2002.1032790

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