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[IEEE SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - Taos, New Mexico, USA (2002.09.27-2002.09.27)] SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - Ellipsometric characterization of shallow damage profiles created by Xe-implantation into silicon

✍ Scribed by Petrik, ; Polgar, ; Lohner, ; Fried, ; Khanh, ; Gyulai, ; Ramadan,

Book ID: 120205276
Publisher: IEEE
Year: 2002
Weight: 272 KB
Category: Article
ISBN-13: 9780780371552
DOI: 10.1109/IIT.2002.1258077

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